EWL-100 / EWU-100
Name of Equipment
Wafer Loader / Wafer Unloader
Loader : Designed to load wafer into next process from wafer cassette.
Unloader : Designed to unload wafer to wafer cassette from production line.
1. Touch Screen for Operating Panel
2. 3 Color Tower Lamp with Audible Alarm
3. Lifter Up and Down High Precision Control by Servo Motor Drive with Ball Screw
4. Wafer Cassette Capacity: 1 Cassette
5. Conforms to SMEMA Spec. 1.2
|Wafer Size (inch)||6" & 8"|
|Machine Dimension (LxWxH, mm)||560x475x1200|